LE100
Level Sensor for cleaning machine |
|
- This product is used to meausre the fluid level of various chemicals and pure water in the cleaning process of the wafer production.
- The fluid level can be read off on a digital display.
- Six or eight digital outputs (open collector) can be set against the fluid levels.
- The specific gravity of the fluid used can be automatically calculated. (Manual calculation is also possible).
- Optional RS-485 serial communication.
|
|
F9000
Temperature Controller with high resolution and fast sampling |
|
- Highly precision controller devloped for steppers.
- Provides 1/1000°C resolution.
- Control can be performed against heater voltage flucturation by the use of power feedforward function.
- Provides optional two-loop control with a single F9000.
|
|
| ST-55/ST-56 Surface Temperature sensor |
- Sensors for tiny surface temperature.
- The use of a thermocouple enables a tiny diameter at the top and measurement of an object with small heat capacity is possible.
- The use of adhesive tape on the measuring point fixes the measurement point firmly (Tefron covering, max. 260°C)
- Sensor length can be extended up to maximum of 800mm (Ceramic coat: D=0.32. Maximum length may differ depending on the element diameter).
- Can be used to measure surface temperature of dummy wafer in semiconductor manufacturing process.
- Can be used to measure temperature on discrete components on the printed wiring board.
- High temperature type (with ceramic coating) can measure up to 500°C.
|
|
| CZ-51P Liquid Sensor |
- This is a single-disk type liquid sensor.
- Measures pressure inside the pipe that changes according to the liquid level.
- PCTFE film is applied on the pressure diaphragm.
- Uses a special O-ring to increase anti-chemical durability.
|
